FPSINPUT.EQP_STATE_DIAGRAM

EQP_STATE

VARCHAR2(48)

N

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

AVAILABILITY

VARCHAR2(4)

AVAILABILITY_BG_COLOR

VARCHAR2(24)

N

AVAILABILITY_DISPLAY

VARCHAR2(48)

N

AVAILABILITY_LONG_DESC

VARCHAR2(1000)

AVAILABILITY_SORT_ORDER

NUMBER(3)

CONSIDER_NONMFG_AS_UP_FOR_MAQT

CHAR(1)

N

There are some NONMFG states like QUAL and ALARM that we want to consider as up for the purposes of the Multi Area Queue Timer logic because we expect the entity to come up in the near future. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

E10_STATE

VARCHAR2(3)

E10_STATE_BG_COLOR

VARCHAR2(24)

N

E10_STATE_DISPLAY

VARCHAR2(48)

N

E10_STATE_LONG_DESC

VARCHAR2(1000)

E10_STATE_SORT_ORDER

NUMBER(3)

E58_SUBSTATE

VARCHAR2(24)

Substate for SEMI E58 categorization. This is for reference and reporting only and can be left balnk (* from FPSINPUT.EQP_L6_DETAILED_STATES)

EQP_STATE_BG_COLOR

VARCHAR2(24)

EQP_STATE_DISPLAY

VARCHAR2(48)

N

Display name for the equipment state which will be displayed on all Dashboards and reports. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

EQP_STATE_LONG_DESC

VARCHAR2(1000)

EQP_STATE_OWNER

VARCHAR2(48)

Person or department who owns each state. This is for reference and reporting only and can be left blank (* from FPSINPUT.EQP_L6_DETAILED_STATES)

EQP_STATE_SHORT_DISPLAY

VARCHAR2(12)

N

EQP_STATE_TECHNICAL_DETAILS

VARCHAR2(1000)

EST_CH_SORT

NUMBER(2)

N

INCLUDE_IN_DASH_DOWN

CHAR(1)

This column will hide tools from the Down tools section of the Equipment Dashboard if set to N for this opportunity state (* from FPSADMIN.ETP_L4_OPPORTUNITY_STATES)

IS_ACTIVE

CHAR(1)

Flag to enable or disable the tag condition. (* from FPSBASE.MSO_TAG_CONDITIONS)

IS_ALARM

CHAR(1)

N

This should be set to Y if the state should count as an alarm event. (This is typically a downtime event automatically triggered by the equipment.) (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_ALLOWED_MNT_FUT_ANY

CHAR(1)

IS_ALLOWED_MNT_FUT_ONLY_ACTUAL

CHAR(1)

IS_DEFAULT_STATE

CHAR(1)

N

IS_EQP_RELATED

CHAR(1)

This should be set to Y for UDT or SDT states where the equipment is solely responsible for the entity being down and is actively being diagnosed or repaired. (Does not include Wait-times or alarms, can include Quals). Should only be Set to Y for Downtime (UDT or SDT) states (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_FUTURE

CHAR(1)

N

This should be set to Y if the state does not apply immediately. Production runoff and alarms are two examples where we do not want to set this state in ETP until the tool misses the cascade and starts to lose productivity. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_HIST_ONLY

CHAR(1)

IS_NST_HIDDEN_ON_HIST

CHAR(1)

N

If yes then do not include time in this NST state in the history. Most NST states should be Y unless there is a specific reason why the client wants it to be part of the total. An example calculation here is if a tool is PRD for 1 day, SBY for 1 day, SDT for 1 day, UDT for 1 day, and NST for 3 days then the totals for the week are 25% each for PRD, SBY, UDT, SBY because the NST is ignored. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_PM

CHAR(1)

This should be set to Y if the state should count as a Preventative Maintenance, PM, event. This should only be Y on Scheduled (SDT) States. This is used in the Mean time to (perform) PM, MTTPM metric. (Does not include Wait-times. Can include Qualifications or Verification tests) (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_QUAL

CHAR(1)

N

This should be set to Y if the state should count as a qual event and time spent in this state should count as qual time. The EQP_L5_QUAL_CHECK constraint ensures that this must be set to Y when mnt_group is QUAL. The is_qual column is critical for NMV_P_TOOL_QUAL_SUMMARY and this constraint is not perfect but it prevents the most obvious wrong case. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_SCHED_QUAL

CHAR(1)

N

This should be set to Y if the state should count as a scheduled qual event. (This is typically a qual run by the equipment operator rather than by the maintenance group.) (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

IS_SDT_SETUP

CHAR(1)

N

Boolean column indicating if the eqp_state is Scheduled Down due to setup conversion. We will note this in ETP_MNT_EPISODE_HIST to differentiate from regular PMs. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

LOT_GROUP_TO_SCHED_LIST

VARCHAR2(64)

By default we will schedule all lots when a tool is in a state where mfg_state is MFG (PRD and SBY but not ENG). For NONMFG states use this column to schedule lots of certain lot_groups, most likely test wafers. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

MFG_GROUP

VARCHAR2(6)

N

MINUTES_UNTIL_SCHED

NUMBER(7)

This value should be set only for NONMFG states and represents the number of minutes from the time when the eqp state changed until we will schedule lots to a tool in this state as long as that time is no earlier than remaining_mins_until_sched from now. The default value in EQP_L6_DETAILED_STATES can be overridden by an entry in EQP_OVR_MINS_UNTIL_SCHED for a specific eqp_type and eqp_state. If the value is EQP_L6_DETAILED_STATES is null then we will not schedule. For example, the current time is 10:00, the current state is SCH-SERVICE, state changed at 02:00, minutes_until_sched is 600, and remaining_mins_until_sched is 90. 02:00 + 600 minutes is 10:00 which is more than 90 minutes away therefore we schedule lots to this tool starting at 10:00. But once the clock passes 08:30 then the original estimate of 10:00 is less than 90 minutes away then we perpetually estimate that the tool will be up in 90 minutes. So at 08:35 we schedule starting at 10:05 then at 08:40 we schedule starting at 10:10 and so on. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

MNT_GROUP

VARCHAR2(36)

Grouping field for upcoming maintenance on Dashboard and Mnt Viewer. This can be any value and should be formatted for display. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

OPERATIONAL_STATE

VARCHAR2(9)

OPERATIONAL_STATE_BG_COLOR

VARCHAR2(24)

N

OPERATIONAL_STATE_DISPLAY

VARCHAR2(48)

N

OPERATIONAL_STATE_LONG_DESC

VARCHAR2(1000)

OPERATIONAL_STATE_SORT_ORDER

NUMBER(2)

OPPORTUNITY_STATE

VARCHAR2(12)

FPS Enhanced Tool Performance group assigned to each transition_state and to each etp_family. This assignment determines the default grouping on all Tool Performance charts and determines the color on all views including Dashboard and Gantt charts. (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

OPPORTUNITY_STATE_BG_COLOR

VARCHAR2(24)

N

OPPORTUNITY_STATE_DISPLAY

VARCHAR2(48)

N

OPPORTUNITY_STATE_LONG_DESC

VARCHAR2(1000)

OPPORTUNITY_STATE_SORT_ORDER

NUMBER(3)

OVERALL_SORT_ORDER

NUMBER(3)

PENDING_SDT_OR_QUAL_OR_ENG

VARCHAR2(4)

When this is populated with either SDT or QUAL or ENG this means that the tool is processing but will stop when all jobs which are currently processing complete. When in this pending state, the process state of lots which are qualified to run on this tool will be DOWN just as if the tool was already SDT or QUAL or ENG. This pending state does not affect ETP logic during efficient processing but after the tool misses cascade then goes to standby then it will be pending maintenance rather than the normal standby state. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

REMAINING_MINS_UNTIL_SCHED

NUMBER(7)

See comment for MINUTES_UNTIL_SCHED column. (* from FPSINPUT.EQP_L6_DETAILED_STATES)

SORT_FOR_EST_CH_USED

NUMBER(4)

TRANSITION_STATE

VARCHAR2(48)

We name this transition_state because ideally this state would be determine what states are allowed to follow but really this is just a grouping which is the parent of eqp_state and child of etp_group (* from FPSINPUT.EQP_L5_TRANSITION_STATES)

TRANSITION_STATE_DISPLAY

VARCHAR2(48)

N

TRANSITION_STATE_LONG_DESC

VARCHAR2(1000)

TRANSITION_STATE_SORT_ORDER

NUMBER(3)