FPSBASE.SCH_P_ADMIN_CHK_BATCHES

JOB_ID

Automatically set by trigger when the first lot of a job logs an event to the tool. (* inherited from FPSBASE.WIP_LOT_HIST)

SCHED_GROUP

This is the grouping of tools and processes which the FPS Scheduler schedules together. Since this is a parent of tool via tool->process_group and a parent of process via process->process_group, by definition each tool and each process can only be in one sched group. We need all related tools and processes to be in the same sched group for efficient scheduling. One example is sinks and furnaces because of queue times and batching. Another example is for smaller facilities like Assembly or Test where we might schedule the entire facility together. (* inherited from FPSINPUT.RTG_PROCESS_GROUPS)

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

PROCESS_STATE

Process state is the most commonly used level of our Enhanced Cycle Time hierarchy. This displays on Dashboard, Scheduler, Cycle Time Analyzer, and Finished Lot Cycle Time Reporter. Process state is the parent of ECT state, however, there is configuration for when to show the process state of Reserved in each application which is done in WIP_ECT_STATES. (* inherited from FPSADMIN.WIP_PROCESS_STATES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

ROUTE

Route that has threading requirements (* inherited from FPSINPUT.RTG_STEP_THREADING)

STEP

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* inherited from FPSINPUT.RTG_ROUTE_STEPS)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

BATCH_CRITERIA

Lots that can run on the same batch TOOL and have the same value of BATCH_CRITERIA can run together in a batch. Therefore this is a critical column for scheduling on batch tools. If BATCH_CRITERIA is not populated, Scheduler defaults to the assumption that any WIP with the same EST_MACHINE_RECIPE can be batched together. Keep in mind that many MESs have additional constraints on batching (for example, that all WIP in a batch has the same SCRIPT_ID) and these must be incorporated into BATCH_CRITERIA to ensure that the batches are allowed by the MES. (* inherited from FPSINPUT.RTG_TOOL_ASSIGNMENTS)