FPSADMIN.ECT_SUMMARY

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

ROUTE

VARCHAR2(256)

N

Route that has threading requirements (* from FPSINPUT.RTG_STEP_THREADING)

STEP

VARCHAR2(256)

N

A single processing step within a route representing a single tool visit. Step is often a very complex string and should rarely be displayed. Instead we should use process_display. (* from FPSINPUT.RTG_ROUTE_STEPS)

BANK

VARCHAR2(36)

N

Lots which are not on a route are considered in a bank and the bank name indicates why the lot is off route. Bank must be NA for lots which are on a route. Our standard filter for active lots is bank = NA. (* from FPSINPUT.RTG_BANKS)

PRD

VARCHAR2(64)

N

Prd determines the route which is used to process the lot in the facility and what tools, recipes, durables, etc. can be used at each step. Prd also determines the next facility for the lot when it finishes its route. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PRDS)

PLANPRD

VARCHAR2(64)

N

Planning product used for all planning purposes. All lots with the same planprd are interchangeable to ship to the customer regardless of their prd, route, technology, wafer size, etc. For detailed information on prd vs. planprd see table comments in RTG_PLANPRDS. (* from FPSINPUT.RTG_PLANPRDS)

PRTY_CTM_GROUP

VARCHAR2(7)

N

This is one of the primary keys of our CTM tables. We use this group rather than the priority because we often have several different priorities which are close and are expected to have the same cycle time. (* from FPSINPUT.WIP_PRIORITIES)

LOT_GROUP

VARCHAR2(8)

N

Lot_group is a grouping of lot_family and is the highest grouping in the lot type hierarchy. There should be only a few values for lot_group, i.e. Prod, Dev, TW. We group WIP and moves by lot_group on the dashboard and we group cycle time calculations by lot_group so this is an important field. (* from FPSINPUT.WIP_LOT_GROUPS)

IS_NONSTD

CHAR(1)

N

Our column to indicate non-standard processing at the step. For example, an experiment or a chain that is only active at a particular step or set of steps and then goes back to being normal for the route. If an experiment is severe enough that it affects the final product and has to be planned separately then it will be its own prd or planprd. (* from FPSBASE.WIP_LOT_HIST)

ABORT_SEC_2D_WAVG

NUMBER(7)

ABORT_SEC_7D_WAVG

NUMBER(7)

ABORT_SEC_FULL_WAVG

NUMBER(7)

ABORT_SEC_LONG_WAVG

NUMBER(7)

AVG_WIP_2D

NUMBER(12,3)

AVG_WIP_7D

NUMBER(12,3)

AVG_WIP_FULL

NUMBER(12,3)

AVG_WIP_LONG

NUMBER(12,3)

BLOCK_SEC_2D_WAVG

NUMBER(7)

BLOCK_SEC_7D_WAVG

NUMBER(7)

BLOCK_SEC_FULL_WAVG

NUMBER(7)

BLOCK_SEC_LONG_WAVG

NUMBER(7)

COMMIT_STEP_SEC

NUMBER(7)

CTM_DATA_INST

DATE

DISP_SEC_2D_WAVG

NUMBER(7)

DISP_SEC_7D_WAVG

NUMBER(7)

DISP_SEC_FULL_WAVG

NUMBER(7)

DISP_SEC_LONG_WAVG

NUMBER(7)

DOWN_SEC_2D_WAVG

NUMBER(7)

DOWN_SEC_7D_WAVG

NUMBER(7)

DOWN_SEC_FULL_WAVG

NUMBER(7)

DOWN_SEC_LONG_WAVG

NUMBER(7)

ENDED_SEC_2D_WAVG

NUMBER(7)

ENDED_SEC_7D_WAVG

NUMBER(7)

ENDED_SEC_FULL_WAVG

NUMBER(7)

ENDED_SEC_LONG_WAVG

NUMBER(7)

EST_LINE_YIELD_PCT

NUMBER(6,3)

Estimated line yield percent for the route-step. Leave blank for the default of no loss expected. A value of 99.5 means we expected 1 unit out of 200 to be lost. (* from FPSINPUT.RTG_ROUTE_STEPS)

EST_SMP_PCT

NUMBER(5,2)

Smp_pct tells you what percentage of the lots complete on a tool. Some sites skip steps by jumping over them so we see the lot move from step 3 to step 5 and we only know that it jumped step 4 because step 4 is on the route between 3 and 5. Other sites skip steps by moving lots into them and then moving them out a second later so we see a move from 3 to 4 at 11:11:11 and a move from 4 to 5 at 11:11:12. We do not care how it is done but just that the lot did not process at step 4 -- and to be more specific that no tool capacity is required to process this lot at step 4 and no cycle time is accumulated at step 4. (* from FPSBASE.WIP_GOAL_LOT_SHIFT)

EST_TRANSIT_SEC

NUMBER(5)

FACILITY_DISPLAY

VARCHAR2(20)

N

The name of the facility displayed on all dashboards and reports. Facility is a short field since it is used in every join so we allow a longer more descriptive name here although often this will be the same as the facility. (* from FPSINPUT.GEN_FACILITIES)

FIFO_STEP_SEC

NUMBER(7)

HOLD_SEC_2D_WAVG

NUMBER(7)

HOLD_SEC_7D_WAVG

NUMBER(7)

HOLD_SEC_FOR_WSF

NUMBER(7)

HOLD_SEC_FULL_WAVG

NUMBER(7)

HOLD_SEC_LONG_WAVG

NUMBER(7)

IS_INACTIVE_STEP

CHAR(1)

Since we now use RTG_ROUTE_STEPS_INACTIVE table, we should only include the active steps on each route in RTG_ROUTE_STEPS. Therefore this value must be set to N in the RTG_ROUTE_STEPS table but will be set appropriately to Y for inactive steps in the RTG_ROUTE_STEPS_PLUS table. (* from FPSINPUT.RTG_ROUTE_STEPS)

IS_MAIN_ROUTE

CHAR(1)

Y indicates the route is the main processing route for PRD. N indicates it is a rework or alternate route. (* from FPSBASE.RTG_ACTIVE_PRD_ROUTES_BASE)

LINE_SECTION

VARCHAR2(32)

Large grouping of the line, e.g. FEOL, BEOL, Cu, etc. There should be only a handful of values for the entire facility - or if the facility only has one section then we can leave this column blank. (* from FPSINPUT.RTG_LINE_SECTIONS)

LONGH_SEC_2D_WAVG

NUMBER(7)

LONGH_SEC_7D_WAVG

NUMBER(7)

LONGH_SEC_FULL_WAVG

NUMBER(7)

LONGH_SEC_LONG_WAVG

NUMBER(7)

MAIN_ROUTE

VARCHAR2(256)

Primary route used by the prd. Excludes rework and alternate routing. We allow this column to be null in WIP_LOTS_VERIFY because we may not be certain what the main route is when we fix for missed events. In that event we trust the WIP_EVENT_HIST triggers has loaded the correct information into WIP_EVENTS_CURR_STEP. (* from FPSINPUT.WIP_EVENT_HIST)

MODULE_DISPLAY

VARCHAR2(20)

The name of the module displayed on all dashboards and reports. We allow a longer more descriptive name here although often this will be the same as the module. (* from FPSINPUT.GEN_MODULES)

NUM_LOTS_MOVED_2D

NUMBER(6)

NUM_LOTS_MOVED_7D

NUMBER(6)

NUM_LOTS_MOVED_FULL

NUMBER(6)

NUM_LOTS_MOVED_LONG

NUMBER(6)

NUM_SHIFTS_IN_2D

NUMBER(4)

NUM_SHIFTS_IN_7D

NUMBER(4)

NUM_SHIFTS_IN_FULL

NUMBER(4)

NUM_SHIFTS_IN_LONG

NUMBER(4)

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

PROCESS_CLASS

VARCHAR2(12)

Top-level grouping of process groups with same general purpose (i.e. Process or Metrology or Nonwafer). Allowed values are defined by FPS and are listed in FPSADMIN.RTG_PROCESS_CLASSES. This field can also be defined in EQP_TOOLS using the ovr_process_class field if we do not know it for the process group. (* from FPSINPUT.RTG_PROCESS_GROUPS)

PROCESS_FAMILY

VARCHAR2(50)

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* from FPSINPUT.RTG_PROCESS_FAMILIES)

PROCESS_MODULE

VARCHAR2(12)

WIP_MODULE is used to credit moves and set goals. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* from FPSBASE.RTG_ROUTE_STEPS_PLUS)

PROC_SEC_2D_WAVG

NUMBER(7)

PROC_SEC_7D_WAVG

NUMBER(7)

PROC_SEC_FULL_WAVG

NUMBER(7)

PROC_SEC_LONG_WAVG

NUMBER(7)

QTY_COMP_2D

NUMBER(12)

QTY_COMP_7D

NUMBER(12)

QTY_COMP_FULL

NUMBER(12)

QTY_COMP_LONG

NUMBER(12)

QTY_MOVED_2D

NUMBER(12)

QTY_MOVED_7D

NUMBER(12)

QTY_MOVED_FULL

NUMBER(12)

QTY_MOVED_LONG

NUMBER(12)

QTY_UNIT

VARCHAR2(12)

N

Defines the unit used to measure number of quantity. The key here is that this quantity must be known throughout the entire route through the facility. For example in a sort facility where lots enter in wafers and are broken into die but the number of wafers is still known when the lot completes the facility then the qty_unit must be wafer. It cannot be die because die is not known when the lot enters so die will be the sec_qty_unit. Similarly at a final test facility where the lots enter with both wafers and die known but only die are known when the lot completes the facility then the qty_unit must be die. It cannot be wafer because wafer is not known when the lot completes so wafer will be the sec_qty_unit. Please note the entire process from only wafers to only die must be split into at least two facilities because of this requirement. (* from FPSINPUT.GEN_FACILITIES)

RESRV_SEC_2D_WAVG

NUMBER(7)

RESRV_SEC_7D_WAVG

NUMBER(7)

RESRV_SEC_FULL_WAVG

NUMBER(7)

RESRV_SEC_LONG_WAVG

NUMBER(7)

ROUTE_FAMILY

VARCHAR2(36)

Route_family indicates that all routes within the family have similar or even identical steps and have the same segments. At facilities where various prds share the same route it is likely that the route will be the route_family. This is sometimes referred to as the main process flow. It is used on Segment Summary and Line Viewer to group similar routes. (* from FPSINPUT.RTG_ROUTE_FAMILIES)

ROUTE_GROUP

VARCHAR2(36)

Route_group is the parent of route_family. Route_group is used on the Dashboard and other applications as a large grouping for filtering. At many sites this is referred to as technology. (* from FPSINPUT.RTG_ROUTE_GROUPS)

ROUTE_SEGMENT

VARCHAR2(36)

Route_segment allows for clear hierarchical segment organization for Segment Summary and Line Viewer on Dashboard. This is often referred to as stage and typically will come from the MES (as opposed to facility_segment which we will typically have to define for our purposes). We recommend that all routes in the same route family have the same route segments in the same order so that the Line Viewer by route family will be consistent but if this is not the case then we approximate the order as best we can. (* from FPSINPUT.RTG_ROUTE_STEPS)

SEQ_NUM

NUMBER(7,2)

Sequence number of step in route (* from FPSINPUT.RTG_ROUTE_STEPS)

SHUTD_SEC_2D_WAVG

NUMBER(7)

SHUTD_SEC_7D_WAVG

NUMBER(7)

SHUTD_SEC_FULL_WAVG

NUMBER(7)

SHUTD_SEC_LONG_WAVG

NUMBER(7)

SMP_RATE_FULL

NUMBER(5,4)

STEP_SEC_2D_WAVG

NUMBER(7)

STEP_SEC_7D_WAVG

NUMBER(7)

STEP_SEC_FULL_WAVG

NUMBER(7)

STEP_SEC_LONG_WAVG

NUMBER(7)

STEP_SEC_NOHOLD_FOR_WSF

NUMBER(7)

The FOR_WSF columns are used in populating WIP_STEP_FUTURE. This is based on the CTM_COLUMN_FOR_WIP_STEP_FUT column in GEN_FACILITIES. For example, if the value of that column is 7D_WAVG then we use the 7D_WAVG cycle times for WSF. (* from FPSBASE.CTM_SUMMARY)

STG_SEC_2D_WAVG

NUMBER(7)

STG_SEC_7D_WAVG

NUMBER(7)

STG_SEC_FULL_WAVG

NUMBER(7)

STG_SEC_LONG_WAVG

NUMBER(7)

TARGET_STEP_SEC

NUMBER(7)

TCT_SEC

NUMBER(7)

Theoretical cycle time in seconds (* from FPSBASE.WIP_LOT_HIST)

TRANSIT_EXPLANATION

VARCHAR2(128)

WAFER_SIZE

VARCHAR2(8)

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* from FPSINPUT.GEN_WAFER_SIZES)

WAIT1_SEC_2D_WAVG

NUMBER(7)

WAIT1_SEC_7D_WAVG

NUMBER(7)

WAIT1_SEC_FULL_WAVG

NUMBER(7)

WAIT1_SEC_LONG_WAVG

NUMBER(7)

WAIT2_SEC_2D_WAVG

NUMBER(7)

WAIT2_SEC_7D_WAVG

NUMBER(7)

WAIT2_SEC_FULL_WAVG

NUMBER(7)

WAIT2_SEC_LONG_WAVG

NUMBER(7)

WAIT3_SEC_2D_WAVG

NUMBER(7)

WAIT3_SEC_7D_WAVG

NUMBER(7)

WAIT3_SEC_FULL_WAVG

NUMBER(7)

WAIT3_SEC_LONG_WAVG

NUMBER(7)

WHY_AVG_WIP_ONLY_FOR_ECTA

VARCHAR2(20)

WHY_IGNORE_FOR_ECTA

VARCHAR2(15)

WHY_OTHERS_2D

NUMBER(3)

WHY_OTHERS_7D

NUMBER(3)

WHY_OTHERS_FULL

NUMBER(3)

WHY_OTHERS_LONG

NUMBER(3)

WHY_PROC_2D

NUMBER(3)

WHY_PROC_7D

NUMBER(3)

WHY_PROC_FULL

NUMBER(3)

WHY_PROC_LONG

NUMBER(3)

WHY_SKIP_2D

NUMBER(3)

WHY_SKIP_7D

NUMBER(3)

WHY_SKIP_FULL

NUMBER(3)