FPSADMIN.EQP_CAP_ENTITIES

FACILITY

VARCHAR2(6)

N

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

CAP_ENTITY

VARCHAR2(19)

N

CAP_ENTITY_CONFIG_CHECK

VARCHAR2(20)

CH_LIST

VARCHAR2(4000)

CH_TYPE_OF_CAP_ENTITY

VARCHAR2(6)

EQP_MODULE

VARCHAR2(12)

EQP_MODULE is the module responsible for operating the tool. See comments on the module column in GEN_MODULES for info on this column and how it relates to eqp_module and mnt_module. (* from FPSBASE.EQP_TOOLS_PLUS)

EQP_TYPE

VARCHAR2(50)

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

IS_CAP_ENT_BY_CH

CHAR(1)

IS_REAL_TOOL

CHAR(1)

Flag indicating whether tool physically exists. An example where this is not set would be lot start or visual inspect. (* from FPSINPUT.EQP_TYPES)