FPSAPP.THP_MANUAL

FACILITY

VARCHAR2(6)

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* from FPSINPUT.GEN_FACILITIES)

EQP_TYPE

VARCHAR2(50)

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* from FPSINPUT.EQP_TYPES)

PROCESS

VARCHAR2(50)

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* from FPSINPUT.RTG_PROCESSES)

EST_MACHINE_RECIPE

VARCHAR2(100)

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

CH_TYPE_CNT

VARCHAR2(128)

This value is a summarizing of ch_used which we use for grouping of throughput. The assumption is that throughput will be the same if the same number of chambers of the same type are used. (* from FPSINPUT.THP_EXTERNAL)

ALWAYS_USE

CHAR(1)

If N then we will only use this value when we do not have a valid automated calculated value for the eqp_type and process. If Y then we will always use this value even if we have a valid auto value. (* from FPSINPUT.THP_EXTERNAL)

COMMENT_MANL

VARCHAR2(256)

Comment referring to the interval and first unit values.

COMMENT_MPU

VARCHAR2(256)

Comment referring to the MPU value.

FIRST_UNIT_SEC

NUMBER(9,3)

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* from FPSINPUT.THP_EXTERNAL)

FIRST_UNIT_SEC_LCL

NUMBER(9,3)

Lower control limit for first unit seconds used in our Throughput monitoring. Obviously this must be less than the manual first unit value.

FIRST_UNIT_SEC_UCL

NUMBER(9,3)

Upper control limit for first unit seconds used in our Throughput monitoring. Obviously this must be greater than the manual first unit value.

INTERVAL_SEC

NUMBER(9,3)

Unit_int_sec or batch_int_sec expected for the lot at the time of processing from our THP tables. (* from FPSBASE.WIP_LOT_HIST)

INTERVAL_SEC_LCL

NUMBER(9,3)

Lower control limit for interval seconds used in our Throughput monitoring. Obviously this must be less than the manual interval value.

INTERVAL_SEC_UCL

NUMBER(9,3)

Upper control limit for interval seconds used in our Throughput monitoring. Obviously this must be greater than the manual interval value.

MPU

NUMBER(8,4)

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* from FPSBASE.WIP_LOT_HIST)

MPU_LCL

NUMBER(8,4)

Lower control limit for MPU used in our Throughput monitoring. Obviously this must be less than the manual MPU value.

MPU_UCL

NUMBER(8,4)

Upper control limit for MPU seconds used in our Throughput monitoring. Obviously this must be greater than the manual MPU value.

UPDATED_INST

DATE

Time when the record was updated according to the source data. Note this is not the time when the record was actually updated in this table - it will almost always be earlier. (* from FPSINPUT.GEN_FACILITIES)

USERNAME_MANL

VARCHAR2(64)

Username who set the interval and first unit values.