FPSINPUT.MSOUI_P_CAPACITY

SMP_RULE_ID

The tag condition that corresponds with the specified sample rule. This must already be defined in MSO_EXTL_TAG_CONDITIONS. (* inherited from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

SMP_RULE_NAME

User friendly name of the sample rule. Always tied to the Rule ID but can be modified if the user wants to change the name. (* inherited from FPSBASE.MSO_RULES)

RULE_GROUP

Unique name for the group. (* inherited from FPSBASE.MSO_RULE_GROUPS)

RULE_CLASS

Unique name for the class. (* inherited from FPSBASE.MSO_RULE_CLASSES)

SMP_RULE_TYPE

Set what type of sample rule this is (Percent, Time or Event). (* inherited from FPSBASE.MSO_RULES)

IS_SUB

LOT

A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

FROM_MSO_INST

FROM_MSO_TOOL

TO_MSO_INST

TO_MSO_PROCESS

The tag condition is only applies at a FROM_MSO_PROCESS that is linked to the specified MSO_PROCESS in this column. If the value is NULL then it applies to all proceses. (* inherited from FPSINPUT.MSO_EXTL_RULE_TAG_COND)

TO_MSO_TOOL

TO_TOOL_MSO_GROUP

TO_TOOL_MSO_MODULE

FROM_TOOL_MSO_GROUP

FROM_TOOL_MSO_MODULE

INST

Time when the event occurred. (* inherited from FPSINPUT.WIP_EVENT_HIST)

STEP_ENT_INST

Time when the lot entered the step. (* inherited from FPSBASE.WIP_LOT_HIST)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

BEG_PROC_INST

time when the lot started processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL)

END_PROC_INST

time when the lot finished processing on the main tool. (* inherited from FPSINPUT.WIP_STEP_HIST_MANUAL)

STEP_TOTAL_SEC

STEP_PROC_SEC

METRO_CLEAR

SUB_CLEAR

NON_SUB_CLEAR

METRO_CLEAR_SEC

SUB_CLEAR_SEC

NON_SUB_CLEAR_SEC