FPSADMIN.DASH_P_ENTITY_STATUS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

ENTITY

The lowest level of the equipment hierarchy that an event can be logged against. Tools, subtools, shared parent tools, chambers, ports are all entities. Load locks are also included although we consider them as ports. (* inherited from FPSINPUT.EQP_STATUS_VERIFY)

ETP_STATE

If entity is down then use eqp_state directly. If entity is up then determine etp_state from proc_state and sby_state. (* inherited from FPSBASE.ETP_STATUS)

ETP_TOOL_PCT

Percentage contribution of this entity to the full tool using cluster tool calculations for etp_state built in to DWH. The main difference from eqp_tool_pct is this includes throughput estimates for partial chambers. This adds to 100 for all entities on a tool at each eqp_inst. (* inherited from FPSBASE.ETP_STATUS)

ETP_FROM_INST

Time when the etp_state changed for any entity on this main tool. (* inherited from FPSBASE.ETP_STATUS)

ETP_OPPORTUNITY_STATE

ETP_OPP_STATE_INST

ETP_INC_BATCH_PCT

Incomplete batch percentage is only set for processing states. In the final calculation, the time processing an incomplete batch is divided into the production state and an incomplete batch state. (* inherited from FPSBASE.ETP_STATUS)

ETP_STATE_CHG_EVENT

ETP_STATE_CHG_INST

Time when the etp_state changed for this entity. (* inherited from FPSBASE.ETP_STATUS)

EQP_STATE

Client equipment state taken directly from their MES or from their existing tool state model. For EQP_MNT_FUTURE, this is the state that we estimate the entity will be in during the maintenance which is often set to a generic PM state if we do not have detailed information. (* inherited from FPSINPUT.EQP_L6_DETAILED_STATES)

EQP_TOOL_PCT

Percentage contribution of this entity to the full tool using cluster tool calculations for eqp_state built in to DWH. This adds to 100 for all entities on a tool at each eqp_inst. (* inherited from FPSBASE.ETP_STATUS)

EQP_FROM_INST

Time when the eqp_state changed for any entity on this main tool. (* inherited from FPSBASE.ETP_STATUS)

EQP_OPPORTUNITY_STATE

EQP_OPP_STATE_INST

EQP_INC_BATCH_PCT

If the input data already knows the incomplete batch percent then we can input it in this value with the event and we will use it for eqp_state calculations. Normally this is blank and we calculate etp_inc_batch_pct from the lot events. (* inherited from FPSINPUT.EQP_EVENT_HIST)

EQP_STATE_CHG_EVENT

Event that last changed the eqp_state. (* inherited from FPSBASE.ETP_STATUS)

EQP_STATE_CHG_INST

Time when the eqp_state changed for this particular entity. If another entity on the same main tool changes state, eqp_inst will change for all entities on the tool even those whose state does not change. Therefore if eqp_inst is after state_chg_inst that means another entity changed state at eqp_inst but this entity has not changed since state_chg_inst. (* inherited from FPSBASE.ETP_STATUS)