FPSAPP.THPT_P_CV_BY_TOOL_PRCS

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

TOOL

Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

CH_TYPE_CNT

This value is a summarizing of ch_used which we use for grouping of throughput. The assumption is that throughput will be the same if the same number of chambers of the same type are used. (* inherited from FPSINPUT.THP_EXTERNAL)

TL_PRCS_NUM_JOBS

NUM_JOBS_TOTAL

TL_PRCS_MPU_CV

MPU_AUTO

AUTO_TRUSTED_PCT_DIFF

MPU_TRUSTED

MPU_LCL

Lower control limit for MPU used in our Throughput monitoring. Obviously this must be less than the manual MPU value. (* inherited from FPSINPUT.THP_MANUAL)

MPU_UCL

Upper control limit for MPU seconds used in our Throughput monitoring. Obviously this must be greater than the manual MPU value. (* inherited from FPSINPUT.THP_MANUAL)

CALC_TYPE_DISPLAY

CASCADE_LENGTH_DISPLAY

INTERVAL_SEC_AUTO

TL_PRCS_INT_CV

INTERVAL_SEC_TRUSTED

INTERVAL_SEC_LCL

Lower control limit for interval seconds used in our Throughput monitoring. Obviously this must be less than the manual interval value. (* inherited from FPSINPUT.THP_MANUAL)

INTERVAL_SEC_UCL

Upper control limit for interval seconds used in our Throughput monitoring. Obviously this must be greater than the manual interval value. (* inherited from FPSINPUT.THP_MANUAL)

FIRST_UNIT_SEC_AUTO

TL_PRCS_FIRSTU_CV

FIRST_UNIT_SEC_TRUSTED

FIRST_UNIT_SEC_LCL

Lower control limit for first unit seconds used in our Throughput monitoring. Obviously this must be less than the manual first unit value. (* inherited from FPSINPUT.THP_MANUAL)

FIRST_UNIT_SEC_UCL

Upper control limit for first unit seconds used in our Throughput monitoring. Obviously this must be greater than the manual first unit value. (* inherited from FPSINPUT.THP_MANUAL)

IS_BATCH_THP

This is a critical value for throughput calculations. Throughput for batch tools is the same regardless of the qty in the batch. Throughput for non-batch tools varies based on the qty in the job. Usually this is Y when max_batch_size_carriers > 1 but not always. We can have tools who load multiple carriers together but whose throughput is calculated per unit. We can also have tools who load only single carriers but whose throughput is calculated per batch. (* inherited from FPSINPUT.EQP_TYPES)

EXP_CASCADE_QTY

Expected number of wafers in a cascade is only for cascading tools which are not batch tools. It is used in throughput calculations to determine how many unit_intervals to count after each first_unit_sec. If this is not populated we use the exp_qty_per_carr_for_wph as the default meaning we cascade just one carrier. This value could also be used in dispatching/scheduling to specify how many wafers should be cascaded before a setup change is allowed. Historical data should be compared to this value regularly to verify it. (* inherited from FPSINPUT.EQP_TYPES)

EXP_CASCADE_BATCHES

Expected cascade batches is only for cascading batch tools. It is used in throughput calculations to determine how many batch_intervals to count after each first_unit_sec. If this is not populated we assume the batch tool does not cascade. This value could also be used in dispatching/scheduling to specify how many batches should be cascaded before a setup change is allowed. Historical data should be compared to this value regularly to verify it. (* inherited from FPSINPUT.EQP_TYPES)

WAFER_SIZE

If the facility only has one wafer size then this column should be null in both RTG_PRDS and EQP_TYPES. If the facility has more than one wafer size then a value of null in EQP_TYPES means that those tools can run all wafer sizes. See column IS_ANY_WAFER_SIZE for details. (* inherited from FPSINPUT.GEN_WAFER_SIZES)

HIDE_ON_THP_PAGE

Some eqp types we just simply do not care about their throughput so we can use this flag to hide them from our Throughput Tracker. (* inherited from FPSINPUT.EQP_TYPES)

USERNAME_TRUSTED

COMMENT_TRUSTED