FPSAPP.THPT_P_H_EQPTYPE_WEEK

START_WEEK

Work weeks must be 7 days in duration and the start of the work week must be the start of one of the work days. (* inherited from FPSINPUT.CAL_WORK_WEEKS)

FACILITY

Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES)

EQP_TYPE

Each tool is assigned an EQP_TYPE and all tools in the same type are identical meaning that they should run at the same throughput when running the same process with the same chamber type count. We also expect similar availability since these tools are identical. However tools in the same EQP_TYPE may have different chamber configurations and may run different groups of processes. (* inherited from FPSINPUT.EQP_TYPES)

PROCESS

Process defines what occurs at a step. Different steps can share the same process if they are identical. Process should normally determine allowed tools and recipe although it can be overridden by step, route, prd, lot, and experiment for exceptions. Each process is dynamically assigned to one or more eqp_type-process_family combinations with use_pct. One process_family is determined to be primary. If grouping is done correctly, a process should only be one eqp_group with no crossover. (* inherited from FPSINPUT.RTG_PROCESSES)

EST_MACHINE_RECIPE

Estimated machine recipe what we estimate will be the machine recipe based on information from the Recipe Management System. It is used in combination with process for throughput calculations and setup change penalty calculations. It is not necessary to estimate for all processes since this is always used in combination however it needs to be NA rather than blank since it is part of the primary key of most THP tables. Hopefully when this is not NA it should match the actual machine recipe logged for each lot during processing. (* inherited from FPSINPUT.RTG_TOOL_ASSIGNMENTS)

CH_TYPE_CNT

This value is a summarizing of ch_used which we use for grouping of throughput. The assumption is that throughput will be the same if the same number of chambers of the same type are used. (* inherited from FPSINPUT.THP_EXTERNAL)

IS_BATCH_THP

This is a critical value for throughput calculations. Throughput for batch tools is the same regardless of the qty in the batch. Throughput for non-batch tools varies based on the qty in the job. Usually this is Y when max_batch_size_carriers > 1 but not always. We can have tools who load multiple carriers together but whose throughput is calculated per unit. We can also have tools who load only single carriers but whose throughput is calculated per batch. (* inherited from FPSINPUT.EQP_TYPES)

NUM_JOBS

AVG_QTY_PER_JOB

CALC_TYPE

IS_VALID

We consider a lot valid for our finished lot calculations when the lot moved through the first step and the last step on the main route for its product. There are some variations such as the lot moved through the first step on an older version of the route or finished with an event specifically marked as a ship event or the route did not have any steps. (* inherited from FPSBASE.ECT_FINISHED_LOT_HIST)

MPU

MPU is a commonly used abbreviation which stands for minutes per unit. It is often referred to as MPW which for minutes per wafer but MPU is better because the unit is not always wafer. (* inherited from FPSBASE.WIP_LOT_HIST)

INTERVAL_SEC

Unit_int_sec or batch_int_sec expected for the lot at the time of processing from our THP tables. (* inherited from FPSBASE.WIP_LOT_HIST)

INTERVAL_STD_DEV

FIRST_UNIT_SEC

Time for one unit to process when the tool starts from a standby state. On a batch tool -- defined as a tool where all units process together and take the same time regardless of qty -- this is the time for the batch. See our complete throughput documentation for more details. (* inherited from FPSINPUT.THP_EXTERNAL)

FIRST_UNIT_STD_DEV

NUM_DISCS_FOR_JOB

Number of discs used in the job as estimated by our throughput logic. (* inherited from FPSBASE.WIP_LOT_HIST)

WAFERS_PER_DISC

This number is specifically used to calculate throughput on tools that run per disc rather than per unit or per batch. It is most commonly set to 13 or 17 for Implant tools. It must be set along with CAN_MULTIPLE_LOTS_SHARE_DISC. (* inherited from FPSINPUT.EQP_TYPES)

EXP_CASCADE_BATCHES

Expected cascade batches is only for cascading batch tools. It is used in throughput calculations to determine how many batch_intervals to count after each first_unit_sec. If this is not populated we assume the batch tool does not cascade. This value could also be used in dispatching/scheduling to specify how many batches should be cascaded before a setup change is allowed. Historical data should be compared to this value regularly to verify it. (* inherited from FPSINPUT.EQP_TYPES)

LOAD_SEC

For throughput purposes, we would like the begin event to be logged when the first wafer of the lot enters the tool so that we can accurately track theoretical cycle time (TCT) which starts at this point. If the tool logs as desired then this column will be 0 and it usually is. But some tools do not log the begin event until some amount of time later, for example after the pumping time. This column exists to account for this delay and it is the number of seconds from when the first wafer enters until the begin is logged. We simply add this time to the processing time to get the TCT. This is by eqp_type as we estimate that all recipes of all tools in the same eqp_type will be consistent in this behavior. Please note that unload_sec is similar for any time after the end event until the lot can be unloaded. (* inherited from FPSINPUT.EQP_TYPES)

UNLOAD_SEC

Seconds after the end is logged until the lot is available to be unloaded. This will often be 0. Unload_sec is added to the first_wafer_sec in throughput calculations. (* inherited from FPSINPUT.EQP_TYPES)

FIXED_CARRIER_SEC

Seconds between units in two different carriers in additional to the normal unit interval. This time is added to the EET, MPU, and UPH. (* inherited from FPSINPUT.EQP_TYPES)

IS_BEST_CTC_FOR_PRCS_RCP_ETYPE

EXP_CASCADE_QTY

Expected number of wafers in a cascade is only for cascading tools which are not batch tools. It is used in throughput calculations to determine how many unit_intervals to count after each first_unit_sec. If this is not populated we use the exp_qty_per_carr_for_wph as the default meaning we cascade just one carrier. This value could also be used in dispatching/scheduling to specify how many wafers should be cascaded before a setup change is allowed. Historical data should be compared to this value regularly to verify it. (* inherited from FPSINPUT.EQP_TYPES)

EXP_QTY_PER_BATCH

Expected wafers in a batch used in throughput calculations and for inc_batch_pct calculation. This value is required to be populated for batch tools. (* inherited from FPSINPUT.EQP_TYPES)

EXP_QTY_PER_JOB

If populated this value is used for the EET/TCT calculation for this eqp type instead of avg_qty_per_carr_for_wph which is the default for the facility. (* inherited from FPSINPUT.EQP_TYPES)

AVG_DISCS_PER_JOB

BOTTLENECK_CASCADE_RATE

This is the maximum fraction of total process time which overlaps with the previous job, within the same data set as used for effective_cascade_rate. We make the optimistic assumption that if this tool were truly a bottleneck, suboptimal cascades could be managed in such a way that they would all be optimal. (* inherited from FPSBASE.THP_EQPTYPE_WEEK_HIST)

BY_WFR_NUM_INTS

BY_WFR_NUM_JOBS

EFFECTIVE_CASCADE_LENGTH

This is the ratio of the total number of jobs to the number of non-cascading jobs. (Again, discarding outliers beyond the 10%-90% range for total process time.) (* inherited from FPSBASE.THP_EQPTYPE_WEEK_HIST)

EFFECTIVE_CASCADE_RATE

This is the weighted average of the fraction of total process time which overlaps with the previous job. This will always be less than or equal to the bottleneck_cascade_rate (outliers beyond 10%-90% for total process time are thrown out). (* inherited from FPSBASE.THP_EQPTYPE_WEEK_HIST)

ENDED_AVG_SEC

ENDED_STD_DEV

FIRSTU_BY_JOB_AVG_SEC

FIRSTU_BY_JOB_STD_DEV

FIRSTU_BY_WFR_AVG_SEC

FIRSTU_BY_WFR_STD_DEV

INT_BY_JOB_AVG_SEC

INT_BY_JOB_STD_DEV

INT_BY_WFR_AVG_SEC

INT_BY_WFR_STD_DEV

PROCESS_FAMILY

See https://help.inficonims.com/display/DW/Guide+to+Process+Families. (* inherited from FPSINPUT.RTG_PROCESS_FAMILIES)