Data Dictionary
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FPSBASE Views
> FPSBASE.WIP_WAFER_HIST_LOOP
View FPSBASE.WIP_HIST_FOR_ETP
A convenient view used for ETP debugging only which unions WIP_EVENT_HIST and WIP_WAFER_HIST events that are relevant to ETP. Please note this view does not have any filtering on inst so it is essential that you add this filter otherwise your query will do a full table scan on both WEH and WWH! We almost always want a filter on tool as well. Furthermore we often want to filter on is_entity which filters out ports or is_event which filters only BEG/END or is_etp which does both. So a sample query: select * from wip_hist_for_etp where inst > data_date - 0.5 and tool = 'TTT' and is_etp = 'Y';
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Column |
Comment |
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INSERTED_TIME |
Timestamp field set by trigger storing SYSTIMESTAMP when record was inserted in the table. (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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T |
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INST |
Time when the event occurred. (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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LOT |
A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC) |
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EVENT |
This is the event registered in the MES. This is for the historical record and display only. Each event is mapped to an FPS event_type and the event_type is what is used by FPS applications. (* inherited from FPSINPUT.WIP_EVENTS) |
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EVENT_TYPE |
Event Type (* inherited from FPSINPUT.EQP_SCHED_EVENTS_MANUAL) |
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LOGGED_ENTITY |
Entity to which event is logged in the MES. This could be a main tool, subtool, entity, or port. In MNT tables this could be a vehicle or durable as well which is why the column width is wider. If main tool or port, we apply the event to all entities. If subtool we apply to all within the subtool. If entity we apply only to the entity. (* inherited from FPSINPUT.EQP_EVENT_HIST) |
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JOB_ID |
Automatically set by trigger when the first lot of a job logs an event to the tool. (* inherited from FPSBASE.WIP_LOT_HIST) |
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ETP_BEG_ACTION |
This is the action passed to the UPDATE_ETP_STATUS_BEG procedure and is useful for debugging ETP to see what action this event triggered. (* inherited from FPSINPUT.WIP_WAFER_HIST) |
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EST_CH_USED |
Estimate of which chambers will used to process this lot based on assignments and status (* inherited from FPSBASE.WIP_LOT_HIST) |
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ACTUAL_CH_USED |
Here is where we can log the actual_ch_used directly if we know it. We have three ways to determine actual_ch_used in WIP_LOTS_REALTIME which populates WIP_STEP_HIST: 1) Log it directly in this colum for an event where the logged_entity is the main tool. 2) Log events to each of the chambers used in WIP_EVENT_HIST. 3) Log events to each of the chambers used in WIP_WAFER_HIST. (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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LOT_SEQ_WITHIN_SEC |
For rows with identical timestamps, sequence records to get proper sequence (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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FACILITY |
Facility is included in almost every join in the DWH so this represents a definitive split. A route must have all steps on tools in the same facility. A tool must process all lots in the same facility. If your site has multiple buildings where lots run on routes using tools in multiple buildings then everything should be one facility. For example, multiple Fab buildings. But if your site has independent facilities like Fab and Test and Assembly where lot may progress from one to the next but on different routes then these should be different facilities. Since this column is in virtually every table it is critical that the value here is exactly matches what is in the MES if the MES has facility. Use facility_display for the display friendly name displayed in applications. See site_name comment for client/site/facility example. (* inherited from FPSINPUT.GEN_FACILITIES) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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OPERATOR |
In history tables, this is the username of the person or system who logged the event. In EQP_MNT_FUTURE, this is the username of the person who input the information about the maintenance event. Usernames can be looked up in GEN_USERS to get full names, email address, etc. Please note that the existence of each username in GEN_USERS is optional, meaning that it is never required for the username logged in the operator column to be in GEN_USERS. (* inherited from FPSINPUT.WIP_EVENT_HIST) |
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EVENT_COMMENT |
Comment associated with the event. (* inherited from FPSINPUT.WIP_HOLD_FUTURE) |
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IS_ENTITY |
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IS_EVENT |
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IS_ETP |