Data Dictionary
>
FPSBASE Views
> FPSBASE.WIP_WAFER_HIST_LOOP
View FPSBASE.WIP_LOTS_TOOLS_WWH_REALTIME
Uses WIP_WAFER_EVENTS_CURR_STEP to get current wafer information about each lot+tool which is perfectly in synch with WIP_WAFER_HIST. Note that if a lot has wafer events logged to multiple tools at the same step that it will have multiple records in this view. This view is used in WIP_LOTS_TOOLS_REALTIME which is used in the WIP_EVENT_HIST_UPDATE_BEF trigger. It is important to do that for accurate population of WIP_STEP_HIST. However the trigger does not get updated with each wafer event so it is also important to use this view directly in WIP_REF_LOTS_COLS_NO_DD_PRTN to get the updated values of num_wfrs_ended and wfr_int_sec_for_est_end.
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Column |
Comment |
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LOT |
A lot is a group of units that process together. Usually lot_id or lot_number in MES. All units in a lot are in the same carrier but there may be multiple lots in a carrier. (* inherited from FPSINPUT.WIP_LOTS_STATIC) |
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TOOL |
Tool is generally just the main tool. The exception is when different entities on the tool run completely independently and it is physically impossible to run wafers of the same lot across multiple entities. In this exception case, we may want to assign the entities to different eqp_types and therefore we should define each entity as a tool. Please note that when we do this there is no indication whatsoever that these different entities are on the same tool. (* inherited from FPSINPUT.EQP_TOOLS) |
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CH_USED_UNSORTED_W_DUPS |
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FIRST_WFR_BEG_INST |
Time when the first wafer of the job started processing. (* inherited from FPSBASE.WIP_STEP_HIST) |
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FIRST_WFR_END_INST |
Time when the first wafer of the job finished processing. (* inherited from FPSBASE.WIP_STEP_HIST) |
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FIRST_WAFER |
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LAST_WFR_BEG_INST |
Time when the last wafer of the job started processing. (* inherited from FPSBASE.WIP_STEP_HIST) |
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LAST_WFR_END_INST |
Time when the last wafer of the job finished processing. (* inherited from FPSBASE.WIP_STEP_HIST) |
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LAST_WAFER_ENDED |
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WFR_BEG_INST_OF_LAST_STARTED |
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WFR_END_INST_OF_LAST_STARTED |
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LAST_WAFER_STARTED |
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NUM_WFRS_BEG |
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NUM_WFRS_ENDED |
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WFR_INT_SEC_FOR_EST_END |
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NUM_INTERVALS_FOR_EST_END |
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BEG_PROC_INST_WWH |
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END_PROC_INST_WWH |
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ACTUAL_MACHINE_RECIPE_WWH |
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ACTUAL_DURABLE_USED_WWH |